Used Track Refurbishment 1 페이지

Full refurbishment to the level of new equipment

• · Track ACT8/12
• · Track Lithius

• · Refurbishment
• · Wafer Size Conversion (100mm,150mm,200mm,300mm)
• · Configuration ( Unit Addition) Modification
• · In-Line Interface Modification : ASML,NIKON,CANON
• · Wafer Flow Modification “Left to Right” to “Right to Left”
• · Chemical Cabinet System Modification/Upgrade
• · Development with Customer for the upgrade